摘要：本文以金属刻蚀去胶腔为背景，简述干刻清洗工艺开发和评价过程。

摘要：本文以金属刻蚀去胶腔为背景，简述干刻清洗工艺开发和评价过程。的英文翻译

基本释义

• Abstract: Based on ash chamber of metal etch, this paper describes the full process of dry clean development and evaluation.