离子束通过薄阻隔层在硅上直接印刷纳米级硅化物结构

离子束通过薄阻隔层在硅上直接印刷纳米级硅化物结构的英文翻译

基本释义

• Direct patterning of nanometer-scale silicide structures on silicon by ion-beam implantation through a thin barrier layer