论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺.

论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺.的英文翻译

基本释义

• In this paper, the Damascene Cu interconnecting integration technology, low-k dielectric materials and barrier materials in Cu interconnecting integration technology are introduced.