A microminiature adaptive optics system with a 37-channel micromachined membrane deformable mirror(MMDM) were built, which features low cost, low power consumption, small size.

• 摘要建立了由微机械薄膜变形镜(MMDM)构成的微小型自适应光学系统，该系统具有低成本、低能耗、体积小的特点。