A system of non-contact optical microscopy system is described. It adopts basic Michelson structure, in which the image is collected by a CCD camera and displayed on a video monitor.

• 介绍一种非接触显微光学检测系统 ,它采用Michelson基本干涉结构 ,光学图象信号由面阵CCD接收 ,再经视频监视器显示。