Abstract: Amorphous hydrogenated carbon films have been deposited with benzene in an electron cyclotron resonance (ECR) plasma system.

• 文摘:用苯作源气体在一个微波电子回旋共振离子体系统中沉积了含氢非晶碳薄膜，研究了沉积参数对膜的生长速率的影响。