Abstract: Silicon and silicon based MEMS Techniques are the main streams of MEMS techniques.The microstructure gas sensors manufactured by these techniques are introdued briefly in the paper.
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- 文摘:硅和硅基微机电系统技术是微机电系统技术的主流,本文主要介绍用这种技术制造的各种微结构气敏传感器。