An excimer laser annealing (ELA) technique can recognize local-high-temperature heating within short duration without the underlying damage, proposed to enhance the crystallinity of films.

  • 准分子雷射退火(ELA)可在局部区域达到高温而不损伤下层结构,因此可用于增进钛酸锶铅薄膜的结晶性。
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