An improved ladder boat for supporting semiconductor wafers during thermal treatments which comprises top and bottom plates vertically opposing each other and support rods secured to said plates.
英
美
- 本发明公开了一种用于在热处理过程中支撑半导体晶片的改进的梯形舟,包括彼此垂直相对的顶和底板,以及固定在所述板上的支撑棒。