Auger electroa spectrometer (AES) and X-ray photoelectron spectrometer (XPS) were used to analyse the component distribution and depth distribution of the metal impurities on the probe surface layer.
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- 利用俄歇电子谱仪(AES)和X射线光电子谱仪(XPS)分析了探针表面层的金属杂质组份分布及深度分布。