Auger electroa spectrometer (AES) and X-ray photoelectron spectrometer (XPS) were used to analyse the component distribution and depth distribution of the metal impurities on the probe surface layer.

• 利用俄歇电子谱仪(AES)和X射线光电子谱仪(XPS)分析了探针表面层的金属杂质组份分布及深度分布。