Because of the special cantilever design, the Si EBE has avoided the high-voltage discharge and electrode short completely, and it has many advantages, such as simple structure, low price, easy maintenance, etc.

• 因为阳极采用悬臂式设计，研制的电子束蒸发器完全避免了高压放电和缓慢短路的问题，并具有结构简单，价格低廉，装配方便等优点。 它已经成功应用于Si单晶薄膜的同质外延生长。