By XPS and XRD spectra of IMO films, it is confirmed that the lattice of IMO is the same as that of body-centered cubic of In203, Mo6+ in IMO substitutes In3+ in In203 and there are not any new compounds in IMO.

• XPS和XRD的测试结果证明,IMO薄膜中的Mo是以Mo~(6+)离子形式取代了In_2O_3晶格中的In~(3+)离子而存在的,没有形成新的化合物,也没有改变体心立方的In_2O_3晶格结构。