By simplifying parts of the micropositioning system based on linearization, this paper analyzes the dynamic characteristics of the system working below resonance frequency, and its transfer function.
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- 本文在线性化的前提下,通过对这种微位移工作台各个组成部分的相应简化,分析了在频响低于共振频率时微位移工作台的动态特性,得出了其传递函数。
