Chapter 1 is an introduction of DPN nitrided gate oxide experiment. The process flow design, device structure and measurement tool are also introduced to realize this experiment.

• 第一章将针对使用去耦电浆氮化闸极氧化层之背景以及实验规划做个简介，包含元件的制程内容、元件结构及量测仪器，以注明本实验之过程。