Consequently, often they are assembled and adjusted, developed are the sputtered Amorphous Thin Film Pressure Sensors with deferent diaphram structures.
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- 对壳体的制造、传感器的装配、调试等做了大量工作,研制出具有 不同弹性敏感元件结构,不同加工方法及不同电路图形的溅射非晶态 薄膜压力传感器。