Curve the films into rectangle waveguide with BCl3 ions. Detect the gain 10.0dB at the 10uW square wave signal and pump power 160mW. Get 4.2dB gain per centimeter.

• 用BCl_3干法刻蚀将镱铒共掺Al_2O_3薄膜刻蚀成光波导，当信号光被调制为1Hz的方波时，在160mW功率泵浦下，光波导放大器的总增益为10.；0dB，单位长度增益为4