Double-layer SnO2-Fe2o3 and triple - layer SnO2 - TiO2 - Fe2O3 thin film materials have been prepared by means of PECVD method and side-heating sensors fabricated.

• 采用PECVD方法，分别注积了SnO2-Fe2O3、SnO2-TiO2-Fe2O3等双层和三层气敏薄膜材料，制成了旁热式传感器。