Due to the diffusion of amorphous carbon in interface layer, the structure of Mo/Si/C multilayer film was changed, and the double diffraction peaks during low-angle X-ray diffraction (LAXD) were observed.

• 同时,由于非晶C在高温条件下的扩散导致薄膜结构发生变化,观测到薄膜的小角衍射曲线中出现并临的双衍射峰结构。