During the last 10 years, the Micro Electro Mechanical System(MEMS) technology has made remarkable progress, and is possible to be integrated into the optical field.

• 在过去的十几年里,随着微机械加工技术的惊人发展,微机电系统(MEMS)与光学技术的结合应用成为可能,这种结合体被称为微光机电系统(MOEMS)。