Failure mechanisms, such as hot-carrier effect (HCE), dielectric breakdown, electro-static discharge (ESD) and electromigration, pose serious threat to the long-term reliability of VLSI circuits.

• 热载流子效应(HCE)、电介质击穿、静电放电,以及电迁移等失效机理,已经对VLSI电路的长期可靠性造成了极大的威胁。