From the view of point of SAW resonator, the paper has analysed the change of thedevice parameter after medium film is deposited onto the surface.

• 本文结合声表面波谐振器的特点，对谐振器表面沉积介质薄膜后引起器件结构参数的变化进行了分析，为研究基于SAW谐振器的传感器提供了一种方法。