However, high cost, complicated ductwork, and assistant equipments such as plasma enhancing and electron cyclotron resonance are usually involved in most conventional atmospheric pressure CVD apparatus.

• 1) 搭建了三套低成本的CVD装置，它们分别是简单CVD装置，单一源化学气相淀积装置，ZnO薄膜的水汽外延装置。