In order to solve the problem of measuring the vacuum degree in vacuum packaged MEMS devices,crystal oscillator has been used as the sensor to measure the vacuum degree.

• 为了解决MEMS器件真空封装内部真空度测试难题,提出采用晶振作为传感器来对内部真空度进行测量,设计并研制了一套基于晶振传感的真空度测量系统。