In order to study influence of experimental parameters on photo-thermal interferometric detection,according to interference principle of equal thickness,a theory model is set up by means of Seidel aberration of tilt.

• 为了研究实验参数对光热干涉检测结果的影响,根据等厚干涉测量原理,利用赛德倾斜像差建立了相应的光热干涉测量模型。