In this paper,the feasibility of lotus effect applied in MEMS to prevent stiction or reduce friction was proposed and investigated,and approaches of fabricating lotus effect surface,as well as some .

• 论证了“荷花效应”应用于MEMS领域仿粘减摩的机理,探讨了类荷叶仿生功能表面的制作方法,并给出了初步试验结果。