Intelligentized microsystem is the main development direction of MEMS, Several integration style of structures of intelligentized microsystem were discussed in this paper,and analyzing the problems in the microsystem researching and applications.

• 智能化微系统是MEMS的下一步的发展方向,介绍了几种构成智能微系统的集成方式,分析了微系统在应用、研究中存在的问题。