It introduces the method of preparation,research of performance and calculation of uncertainty of mixed gas reference material of tetrafluoromethane,nitrous oxide and hexafluoride in helium.

• 论述了氦中四氟甲烷、氧化亚氮和六氟化硫混合气体标准物质的制备方法、性能考察、不确定度计算,经与国内外同类标准物质比较,证明量值准确可靠、方法可行。