It is shown that the bulk etching rate as a function of etching temperature can be described by Arrhenius equation Vb=ae-E/KT.
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- 研究结果表明;体蚀刻速度与蚀刻温度遵守Arr-henius方程V_b=a·e~(-E/KT);其中;体激活能E=0.;66±0。