It is the first time to superfine process the micromachine component by using 248nm ultraviolet wavelength of excimer laser.

• 首次采用紫外波长为248nm的准分子激光对微机械构件常用的陶瓷、硅和金属等材料表面进行了微细加工，构造出准分子激光加工表面微观形貌。