It need precisely control deposition parameters for prepared high-quality VO2 films, because it has complex of V-O valence configuration and similar of formation condition of many vanadium oxides.

• 但因V-O价态结构复杂,许多氧化钒的形成条件又比较相近,想制备高质量的VO2薄膜,必须严格控制制备工艺参数。