Keywords Uncooled infrared imaging;Infrared FPAs;Uncooled infrared detector;Microbolometer;Vanadium oxide film;Microbridge;Readout integrated circuit;Monolithic integration technology;

• 非致冷红外成像;红外焦平面;非致冷红外探测器;微测辐射热计;氧化钒薄膜;微桥结构;读出电路;单片集成技术;