Keywords micro machining;USM;combined technology of USM and ECM;amplitude transformer horn;micro-tool;single-crystal silicon;piezoelectricity ceramic;cemented carbides;
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美
- 微细加工;超声加工;超声电解复合加工;变幅杆;微细工具头;压电陶瓷;单晶硅片;硬质合金;