Low sputtering power results in less compact A1 film and weak interfacial adhesion, whereas high sputtering power overheats and considerably bends the composite films.

  • 结果表明:溅射功率是决定复合薄膜质量的重要因素,功率过低得不到致密的铝层结构,而且铝层容易从氟塑料表面脱离,功率过高则会产生很强的热效应而使复合薄膜弯曲。
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