Micro Electro Mechanical Systems(abbreviated as MEMS), is a system device which uses micro manufacturing technology combining the mechanical unit, sensor, executing organ and electronic element to a micro base plate.

• 微机电系统(Micro Electro Mechanical Systems ,简称MEMS)是通过微制造技术将机械单元、传感器、执行器件和电子元件整合到一片微基板上的系统装置。