Micro cantilever electromagnetic actuator is described.Numerical models about the magnetic force and displacement of the beam are established according to the electromagnetics principle.3.
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- 3.;建立了平面线圈磁场的数学模型;推导出电磁式微致动器悬臂梁的变形与致动器各个参数之间的关系;并进行参数匹配。