Now, many kind of 3D microstructure fabrications were developed, in which microlithography was changing characteristics in local area of photoresister, which illuminated UV light.

• 延伸传统精密加工方法之微加工系统方法，其中之微影加工技术是利用紫外线光线照在光阻产生变化，使得显影作用于光阻剂的局部范围。