Optical Switches (OSW) and Variable Optical Attenuators (VOA) are key components in fiber-optic communication systems and Micro-Electro-Mechanical Systems (MEMS) is a promising OSW technology.

• 摘要光开关和可变光衰减器(VOA)是光通信系统中的关键器件，而微电子机械系统(MEMS)技术是一种具有发展前景的光开关技术。