Particulates can emanate from process equipment (E.G., in CVD and etch reactors)as well as from humans (From street clothes, skin flakes, etc.

• 尘粒也能由工艺设备（如化学气相淀积和刻蚀反应器）以及工作人员（身穿的外套，体表的皮屑等）而产生。