Presents a model of a gantry robot used in semiconductor end-package.The dynamic model considers the transverse and torsional flexibility between the linear guider and the sliders.

• 推导出应用于半导体后封装设备的拱架机器人数学模型，此动力学模型考虑了直线导轨与滑块间的横向与扭转柔性。