Residual Damage of BF_2~+F~+ + B~+and Ar~+ +B~+ Implanted Silicon After RTA and Influence on Shallow P~+ N Junction

• BF_2~+,F~+ +B~+和Ar~++B~+注入硅快速退火剩余损伤及对浅P~+N结的影响(英文)