Silicon, which bears excellent optical properties, is not only the basic material for IC (Integrated Circuit) and MEMS (Micro-Electro-Mechanical-System), it is also one of the important materials for integrated optics.

• 而硅材料不仅是微电子与微机电系统(MEMS: Micro-Electro-Mechanical-System)的基础材料,同时也凭借着出色的光电特性成为集成光学的主要材料之一。