Some XPS deconvolution applications of MEM computer software developed by authoers showed the Maximum Entropy Method made a breakthrough in XPS deconvolution processing.

• 介绍了所研制的MEM最大熵退卷积计算机软件系统在XPS谱线退卷积中的应用情况，显示了这一方法在XPS谱退卷积中所带来的突破性进展。