Super hard, thick DLC multilayer films has been investigated by filtered cathodic vicuum arc deposition, FCVA technology.

• 采用过滤真空阴极直流弧源(FilteredCathodic Vicuum Arc Deposition；FCVA)方法沉积超硬(>6000HV)超厚(微米级)的DLC/DLC多层薄膜.