Surface morphology and composition of the A1 film were characterized with field emission scanning electron microscopy (FESEM) and energy dispersive spectroscopy (EDS) to optimize A1 film growth conditions.

• 利用场发射扫描电镜(FESEM)及能量散射谱(EDS)分析仪对沉积的铝层进行了表面形貌的表征和化学组分的分析。