The SEM, XRD and Raman results show the samples have nano-meter grain size and good quality.The tryout results show that the NCD coated AFM probes can fulfill the applications demands.

• 进行了AFM探针沉积NCD膜实验，对探针表面NCD涂层的微结构进行了分析与表征，并使用制备的NCD涂层AFM探针成功扫描出了样品图像。