The Ti/TiN multiplayer with super hardness has been deposited by adjusting the modulation period, and the maximum of hardness is 4799 kgf/mm2. There are two reasons in improving the hardness of films.

• 通过调整Ti/TiN薄膜的调制周期和周期比，制备了具有超硬特性的Ti/TiN多层薄膜，显微硬度最高可达Hk4799 kgf/mm~2；