The addition of SiO_2 in CoPt alloy thin film impede the growth of CoPt grain, the parameter of CoPt grain decreased from 52nm to 12nm.

• SiO_2添加可以有效抑制CoPt晶粒的生长、将CoPt合金的晶粒大小从50nm左右减小到12nm左右；SiO_2的掺杂提高了CoPt合金的有序化温度；含20vol.