The annealing effects on electrical and optical properties of ITO films under different atmospheres were studied using X-ray diffraction (XRD), Hall Effect and UV-VIS-NIR spectrometer.

• 利用X射线衍射、霍尔效应、UV-VIS-NIR分光光度计等测试手段对薄膜样品进行表征,研究了不同热处理气氛及温度对ITO薄膜光电特性的影响。