The calculation way of the lattice mismatch through a new simpilied model between semiconductor epitaxy and substrate are analysed, and the way of determine the lattice mismatch in XRD are also discussed.

• 结果表明，正三角形晶格和长方形晶格匹配，长方形晶格的宽列原子的匹配具有优先性，不受长列原子匹配的影响。