The characteristics of an electrostatically actuated comb-drive microgripp er were tested with its information and status acquired using the t est platfor m of Microscope-CCD-micro-computer.

• 对一种梳状静电致动微夹持器的特性进行了测试。采用显微镜-CCD-微机测试方案,微夹持器的状态信息通过数据采集及图像处理获取,得到“电压-位移”特性曲线并建立了数学方程。